منابع مشابه
Three-axis piezoresistive accelerometer with adjustable axial resolutions
A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.
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In recent years, nanocomposites based on various nano-scale carbon fillers, such as carbon nanotubes (CNTs), are increasingly being thought of as a realistic alternative to conventional smart materials, largely due to their superior electrical properties. Great interest has been generated in building highly sensitive strain sensors with these new nanocomposites. This article reviews the recent ...
متن کاملModeling and Simulation of Novel Structure for Sub-millimeter Solid-state Accelerometer with Piezoresistive Sensing Elements
This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel propos...
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The use of advanced embedded system technologies such as microelectromechanical system ~MEMS! sensors and wireless communications hold great promise for measuring the response of civil structures to ambient and external disturbances. In this paper, the design of a high-performance, planar piezoresistive MEMS accelerometer is discussed in detail. The piezoresistive accelerometer possesses superi...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2014
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2014.11.736